Components
|
UT Multilayer |
ZrO2+HfO2
|
86.3% ~ 94.2% |
Y2O3
|
5.8% ~ 9.7% |
Er2O3
|
<2%
|
Fe2O3
|
<0.5%
|
Al2O3
|
<0.5%
|
Other Oxides |
<0.5%
|